Generate 2D periodic structure on photoresist by laser lithography. (a) Photography of dispersed white light generated by 2D periodic structure. (b) 3D microscopy image. (c) Photograph of diffraction spots produced by two-dimensional periodic structures
Laser lithography
We provide state-of-the-art laser lithography technologies and system.
We can provide the solutions or OEM services for micro-fabrication in academic research and industrial R&D.
Features
Area of lithography: from few mm to 100 mm
Line width: from 0.15 um to few um
Applications
1D binary grating
1D multiple pitch grating
2D periodic structure
Meta surface